English

TEL DNS Track

Model

Tel Track Mark V, Mark Vz, Mark7, Mark8, Act-8, Act-12

DNS Track DNS60, DNS80 series


Service

Refurbish, Relocation, Installation, Modification
 
Manufaturing
- Auto Drain system, Manual Coater,

Chemical Mixing System, Hot plate module,

LED Coater/Developer, Mark-Vz Load/Unload/Align Unit

 
New Brand Wafer Track System

    - 2" ~ 6" Round wafer, Process (Coater, Developer, Scrubber)

    - 8" ~ 12" Round wafer, Process (Coater, Developer, Scrubber)

    - 5" ~7" Square Type, Process (
Coater, Developer, Etcher, Stripper)

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