TEL / DNS Track Model
Tel Track Mark V, Mark Vz, Mark7, Mark8, Act-8, Act-12
DNS Track DNS60, DNS80 series
Service
Refurbish, Relocation, Installation, Modification
Manufaturing - Auto Drain system, Manual Coater, Chemical Mixing System,
Hot plate module, LED Coater/Developer, Mark-Vz Load/Unload/Align Unit
New Brand Wafer Track System
- 2" ~ 6" Round wafer, Process (Coater, Developer, Scrubber)
- 8" ~ 12" Round wafer, Process (Coater, Developer, Scrubber)
- 5" ~7" Square Type, Process (Coater, Developer, Etcher, Stripper)